Fused Quartz Tubes & Liners
Quartz Diffusion Tube
High-purity fused quartz diffusion and oxidation tubes for semiconductor furnaces — straight bore, flanged, and bell-end configurations for 4" to 12" wafer processes.
By Semiconductor Process
Epitaxy & Annealing
Thermally stable quartz and sapphire components for epitaxy and annealing processes that require low contamination and resistance to repeated thermal cycling.
Relevant Components
Domes, susceptor trays, liners
10 results
Fused Quartz Boats & Carriers
Quartz Wafer Boat
Precision-machined fused quartz wafer boats for horizontal and vertical diffusion furnaces — 25-slot standard and custom slot count for 4" to 12" wafers.
Fused Quartz Rings & Flanges
Quartz Focus Ring & Etch Ring
Precision-machined fused quartz focus rings, etch rings, and edge rings for plasma etching and CVD chambers — ±0.01 mm tolerance, Ra 0.1 μm surface finish.
Fused Quartz Chambers & Bell Jars
Quartz Bell Jar & Dome
Blown and formed fused quartz bell jars and domes for CVD, epitaxy, and sputtering reactor enclosures — up to 500 mm diameter with hermetic weld flanges.
Fused Quartz Custom Parts
Quartz Gas Injector & Showerhead
Precision multi-hole quartz gas injectors and showerheads for uniform gas distribution in CVD, ALD, and diffusion furnace systems — hole arrays to ±0.02 mm positional accuracy.
Fused Quartz Tubes & Liners
Quartz Reactor Tube
High-purity fused quartz reactor tubes for epitaxy, CVD, and RTP systems — available with polished inner bore, side ports, and precision-ground flanges for process chamber integration.
Fused Quartz Plates & Windows
Quartz Viewport Window
Optically polished fused quartz and sapphire viewport windows for semiconductor process chamber monitoring — UV to mid-IR transmission, hermetic metal or CF flanges.
Sapphire Plates & Windows
Sapphire Window & Optical Flat
Single-crystal sapphire windows and optical flats for semiconductor process chambers — UV to mid-IR transmission, Ra < 0.1 nm, extreme plasma and chemical resistance.
Alumina (Al₂O₃) Boats & Carriers
Ceramic Wafer Carrier & Boat
High-purity alumina and silicon carbide wafer carriers, boats, and cassettes for high-temperature semiconductor processes — superior wear resistance and thermal shock capability.
Fused Quartz Custom Parts
Custom Precision Parts
Drawing-based custom fabrication of fused quartz, sapphire, and technical ceramic components — from prototype to production, any geometry, any specification.