Quartz Reactor Tube

Quartz Reactor Tubes

Reactor tubes differ from standard diffusion tubes in their higher purity requirements, tighter dimensional tolerances, and more complex geometry — typically including side ports, flanged ends, polished inner surfaces, and integration with water-cooled metal assemblies.

---

Construction Features

Inner Surface Finish

CVD and epitaxy reactor tubes require smooth inner surfaces to prevent film nucleation on the tube walls, reduce particle generation from flaking deposits, and facilitate cleaning.

Finish Level	Ra	Method	Application
Standard	Ground finish	Grinding	General LPCVD, oxidation
Precision	Fine-ground finish	Fine grinding	APCVD, epitaxy
Polished	Polished finish	CMP / flame polish where applicable	Epitaxy, ALD, or process-sensitive applications

---

Side Ports

Gas inlet and outlet ports, thermocouple feedthroughs, and pressure taps are welded into the tube wall at specified positions.

Port Feature	Specification
Port OD range	6–50 mm
Angular position	Reviewed by drawing
Axial position	Reviewed by drawing
Weld integrity	Leak testing can be arranged for relevant welded ports when specified
Port tube length	Custom per drawing or sample

---

End Flanges

Reactor tubes typically terminate in precision-ground flanges that interface with water-cooled metal headers.

• Flange flatness: reviewed against mating interface requirements
• Concentricity to bore: reviewed against drawing requirements
• Available: Flat-face, stepped, or OEM-profile matched

---

Grade 2 Synthetic Silica as Standard

Reactor tubes for epitaxy and high-purity CVD are often reviewed for Grade 2 synthetic fused silica or other high-purity quartz material sources, depending on trace-metal limits and process requirements.

Grade 1 natural fused quartz is available for less-critical applications or where the lower cost is a priority.

---

Quality Verification Package

Test	Details
Material purity	Material certificates or trace-metal analysis can be discussed based on source and order scope
Dimensional inspection	Drawing-critical dimensions can be checked by CMM or calibrated gauges when specified
Leak test	Can be arranged for relevant welded or vacuum components when specified
Inner surface finish	Profilometer checks can be discussed when surface finish is critical
Stress review	Polariscope review can be arranged for relevant thermal-processed parts
Visual inspection	Bubble, cord, inclusion, and surface condition checks as required