Sapphire
Sapphire Window & Optical Flat
Single-crystal sapphire windows and optical flats for semiconductor process chambers, optical monitoring, and high-temperature applications, with specifications reviewed case by case.
Custom dimensions and specifications available upon request.
Technical Specifications
| Parameter | Value |
|---|---|
| Material | Single-crystal Al₂O₃; grade confirmed by material source |
| Crystal Orientation | C-plane (0001) standard; A, R, M-plane available |
| Surface Roughness | Specified per optical requirement |
| Surface Form | Reviewed case by case |
| Transmission Range | Depends on grade, thickness, and wavelength |
| Max Use Temperature | Application-dependent |
Sapphire Window & Optical Flat
Sapphire Windows & Optical Flats
Sapphire windows are used where fused quartz may be inadequate, such as plasma-intense environments, high-temperature applications, or projects that require broader optical transmission for pyrometry or spectroscopy. Final material suitability should be reviewed against the operating environment and mounting design.
Material Advantages Over Fused Quartz
| Property | Fused Quartz | Sapphire | Selection Note |
|---|---|---|---|
| Hardness | Lower than sapphire | Very high hardness | Sapphire may be preferred for wear or plasma-facing use |
| Temperature exposure | Application-dependent | Application-dependent | Review mounting and thermal-cycling conditions |
| Mid-IR transmission | Limited by grade and thickness | Broader range possible | Confirm wavelength, thickness, and surface finish |
| Chemical resistance | Strong for many processes | Strong for many processes | Review chemical concentration, temperature, and exposure time |
| Surface finish | Polishing available | Optical polishing available | Specify flatness, roughness, and inspection method |
Standard Window Specifications
Unmounted Sapphire Windows
| Specification | Standard | Precision |
|---|---|---|
| Diameter tolerance | Per drawing | Reviewed for critical dimensions |
| Thickness tolerance | Per drawing | Reviewed for critical dimensions |
| Surface roughness (both faces) | Specified by application | Reviewed with measurement method |
| Flatness | Specified by application | Reviewed with inspection method |
| Parallelism | Specified by application | Reviewed with inspection method |
| Scratch-dig | Optional specification | Reviewed for optical-grade orders |
| Crystal orientation accuracy | Optional specification | Verification can be discussed when required |
| Coating | Bare window standard | Coating requirements reviewed case by case |
Crystal Orientation Options
| Orientation | Birefringence | Best For |
|---|---|---|
| C-plane (0001) | Zero (z-propagation) | General windows, LED substrates |
| A-plane (11-20) | Max birefringence | Specialized optical applications |
| R-plane (10-12) | Intermediate | Heteroepitaxy substrates |
| M-plane (10-10) | Intermediate | Specialized semiconductor |
| Custom off-axis | Per spec | Customer-specified optical axis |
Crystal orientation verification and related documentation can be discussed when the application requires a specified orientation.
Optical Transmission Data
| Wavelength Range | Review Note |
|---|---|
| UV | Confirm grade, thickness, surface finish, and inspection method |
| Visible / NIR | Confirm wavelength band and transmission requirement |
| Mid-IR | Confirm wavelength, thickness, mounting, and thermal conditions |
Typical Applications
- Plasma chamber viewports — resist plasma erosion where quartz would fail
- Pyrometry windows — mid-IR transmission requirements reviewed by wavelength and thickness
- Laser processing windows — optical and damage-threshold requirements reviewed case by case
- High-temperature reactor viewports — RTP and epitaxy applications reviewed against mounting and thermal cycling
- Wear-resistant covers — wherever mechanical abrasion would damage quartz
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