Fused Quartz
Quartz Gas Injector & Showerhead
Custom multi-hole quartz gas injectors and showerheads for gas distribution in CVD, ALD, and diffusion furnace systems, fabricated to drawing after geometry review.
Custom dimensions and specifications available upon request.
Technical Specifications
| Parameter | Value |
|---|---|
| Material | Fused quartz Grade 1 or Synthetic fused silica Grade 2 |
| Min Hole Diameter | Reviewed by wall thickness and geometry |
| Hole Position Accuracy | Reviewed from CAD pattern |
| Hole Diameter Uniformity | Specified per drawing |
| Max Hole Count | Reviewed by part size and inspection scope |
| He Leak Rate (Assemblies) | Leak testing reviewed when specified |
Quartz Gas Injector & Showerhead
Quartz Gas Injectors & Showerheads
Uniform gas distribution is critical to film thickness uniformity in CVD, ALD, and diffusion processes. Quartz gas injectors and showerheads use drawing-based orifice patterns to help align gas delivery with equipment and process requirements.
Product Types
Tube Injector (Side-Port / Bubbler Style)
A quartz tube with laser-drilled or diamond-drilled holes along its length — inserted into a furnace tube to distribute gas along the wafer stack.
| Parameter | Specification |
|---|---|
| Tube OD | Per drawing |
| Hole diameter | Reviewed by wall thickness and drilling method |
| Hole position accuracy | Reviewed from CAD pattern and inspection scope |
| Hole pitch tolerance | Specified per drawing |
| Leak testing for end fittings | Arranged when specified for relevant assemblies |
| Available lengths | Reviewed by material form and handling requirements |
Flat Showerhead Plate
A flat quartz plate with a precisely patterned hole array — provides uniform shower-type gas delivery over a large wafer area.
| Parameter | Specification |
|---|---|
| Plate size | Reviewed by material form and flatness requirement |
| Min hole diameter | Reviewed by plate thickness and drilling method |
| Hole position accuracy | Reviewed from CAD pattern and inspection scope |
| Hole count | Reviewed by part size and inspection scope |
| Plate thickness tolerance | Specified per drawing |
| Flatness | Specified per application |
Hole patterns are CNC-programmed from customer CAD files or reviewed with our engineers for the intended flow distribution.
Annular Gas Ring Injector
Circular quartz ring with inward-facing holes — delivers gas symmetrically around the perimeter of a chamber for radial flow profiles.
| Parameter | Specification |
|---|---|
| Ring OD | Per drawing |
| Hole diameter | Reviewed by ring geometry |
| Angular hole spacing | Specified per drawing |
| Ring cross-section | Round or D-profile |
| Material | Grade 1 or Grade 2 |
Drilling Accuracy
Hole arrays require controlled positional accuracy to support flow conductance targets. Requirements should be reviewed against the CAD pattern, material thickness, and inspection method:
| Metric | Value |
|---|---|
| Hole position (CNC grid) | Reviewed per CAD pattern |
| Hole diameter repeatability | Specified per drawing |
| Hole roundness | Reviewed by inspection method |
| Taper | Reviewed by hole depth and drilling route |
| Exit chipping | Reviewed by edge-quality requirement |
Inspection scope for multi-hole parts can include pattern checks, optical inspection, or dimensional records when agreed before production.
Flow Conductance Uniformity
The practical requirement for showerheads is flow uniformity — not just positional accuracy. We offer:
- Hole-pattern review for flow distribution requirements upon request
- Differential pressure or flow checks can be discussed when customer test criteria are provided
- Replacement parts can be reviewed against drawings, samples, or agreed conductance requirements
Related Products
Quartz Diffusion Tube
Fused quartz diffusion and oxidation tubes for semiconductor furnaces — straight bore, flanged, and bell-end configurations reviewed against furnace and process requirements.
Quartz Baffle & Insert
Custom-machined fused quartz baffles, liners, and thermal shields for semiconductor furnace tubes, diffusion systems, and CVD reactors.
Quartz Cleaning Tank
Welded fused quartz wet cleaning vessels for semiconductor wet-process applications, with chemistry compatibility and cleaning requirements reviewed by project.
Ready to order or need a custom size?
Submit your drawing or specifications — we respond within 24 hours.