Quartz Focus Ring & Etch Ring
Machined fused quartz focus rings, etch rings, and edge rings for plasma etching and CVD chambers, fabricated to drawing-based tolerance and surface requirements.
By Semiconductor Process
Plasma-resistant quartz, sapphire, and ceramic components for wet, dry, and plasma etching tools where uniformity and cleanability are critical.
Focus rings, chambers, showerheads
6 results
Machined fused quartz focus rings, etch rings, and edge rings for plasma etching and CVD chambers, fabricated to drawing-based tolerance and surface requirements.
Blown and formed fused quartz bell jars and domes for CVD, epitaxy, and sputtering reactor enclosures, fabricated to drawing with sealing requirements reviewed by project.
Welded fused quartz wet cleaning vessels for semiconductor wet-process applications, with chemistry compatibility and cleaning requirements reviewed by project.
Fused quartz and sapphire viewport windows for semiconductor process chamber monitoring, with optical, sealing, and flange requirements reviewed case by case.
Single-crystal sapphire windows and optical flats for semiconductor process chambers, optical monitoring, and high-temperature applications, with specifications reviewed case by case.
Custom precision components in fused quartz, sapphire, and technical ceramics manufactured from drawings or samples for semiconductor, optics, laboratory, and industrial applications.