Fused Quartz
Quartz Cleaning Tank
Welded fused quartz wet cleaning vessels for semiconductor wet-process applications, with chemistry compatibility and cleaning requirements reviewed by project.
Custom dimensions and specifications available upon request.
Technical Specifications
| Parameter | Value |
|---|---|
| Material | Fused quartz Grade 1 (≥ 99.99% SiO₂) |
| Wall Thickness | 5–10 mm (size dependent) |
| He Leak Rate (All Welds) | Leak testing reviewed when specified |
| Max Operating Temperature | Reviewed by chemistry and exposure |
| Chemical Compatibility | Reviewed by concentration, temperature, and exposure time |
| Weld Joint Strength | Reviewed by tank geometry and weld design |
Quartz Cleaning Tank
Quartz Wet Cleaning Tanks
Quartz cleaning tanks are used as containment vessels for wet chemical processing in semiconductor wafer fabrication. Projects may involve HF-based cleaning solutions, RCA cleaning chemistries, sulfuric-peroxide mixtures, or DI water rinse baths, with compatibility reviewed against concentration, temperature, and exposure time.
Fused quartz is often selected for wet-process equipment because of its chemical resistance and low-metal material profile, but final suitability should be confirmed for the specific chemistry, bath temperature, and tank design.
Standard Tank Configurations
Open-Top Single Tank
Rectangular welded box, open top, for manual or robotic wafer immersion.
| Wafer Size | Internal Dim. (L×W×H) | Wall | Holds |
|---|---|---|---|
| 4” cassette | 160 × 130 × 200 mm | 5 mm | 1 cassette |
| 6” cassette | 210 × 175 × 250 mm | 6 mm | 1 cassette |
| 8” cassette | 260 × 225 × 300 mm | 7 mm | 1 cassette |
| 12” cassette | 380 × 340 × 380 mm | 8 mm | 1 cassette |
| Custom | Per specification | 5–10 mm | Per spec |
Internal surface finish can be specified based on cleaning, draining, and inspection requirements.
Cascade / Overflow Rinse Tank
Tiered tanks with overflow weirs for continuous DI water rinsing. Chemical-to-DI water carry-over is eliminated by the cascade design.
- Integral overflow lip on one or both long sides
- Drain port with quartz fitting (Swagelok-compatible)
- Level sensor bosses (optional)
Megasonic Tank
Bottom-plate thickness and geometry can be reviewed for megasonic transducer bonding when integrator specifications are provided.
Chemical Compatibility
Chemical compatibility should be reviewed against concentration, temperature, exposure time, tank geometry, and process cleaning requirements before quotation. Please share the chemistry, operating temperature, expected bath life, and any particle or contamination-control requirements.
Construction & Quality
Joints are oxy-hydrogen fusion welded and reviewed according to the tank geometry and service environment. Post-weld quality steps can include:
- Stress-relief annealing where required by the design
- Leak testing for welded or vacuum-relevant features when specified
- Dimensional inspection of agreed critical dimensions
- Visual inspection of weld seams and internal surfaces
Related Products
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Custom multi-hole quartz gas injectors and showerheads for gas distribution in CVD, ALD, and diffusion furnace systems, fabricated to drawing after geometry review.
Quartz Diffusion Tube
Fused quartz diffusion and oxidation tubes for semiconductor furnaces — straight bore, flanged, and bell-end configurations reviewed against furnace and process requirements.
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