Quartz Baffle & Insert

Quartz Baffles, Liners & Thermal Inserts

Baffles and inserts serve secondary but critical roles in semiconductor thermal processing equipment:

• Gas flow baffles — condition gas entering or exiting the process tube for uniform flow distribution
• Thermal shields — reduce end-zone temperature gradients in horizontal furnaces
• Tube liners — replaceable inner liner protects the primary process tube from deposition buildup
• Boat stands — support wafer boats at the correct height and position

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Product Types

Disc Baffle (Gas Flow Conditioner)

Flat quartz disc with central hole and optional peripheral holes — installed at furnace tube ends to condition gas entry.

Parameter	Value
OD tolerance	±0.3 mm
Thickness tolerance	±0.2 mm
Central hole diameter	Tube ID clearance fit
Flatness	< 0.1 mm
Available in	Transparent (Grade 1) or Opaque (Grade 3)

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Tube Liner (Process Tube Insert)

Thin-wall quartz tube inserted inside the main process tube — receives deposition buildup and is periodically replaced, extending the life of the primary tube.

Parameter	Value
Wall thickness	1.5–3 mm
OD clearance in process tube	0.5–2 mm radial
Length	Matched to process zone ± 20 mm
Material	Grade 1 or Grade 2 (matching process tube)

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Thermal End Shield

Opaque fused quartz (Grade 3) discs or plugs inserted at furnace tube ends to reflect infrared radiation back into the process zone, improving temperature uniformity.

• High IR reflectivity (> 90%) reduces end-zone heat loss
• Multiple discs stacked for improved insulation
• Available in sizes matching all standard furnace tube IDs

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Boat Stand / Pedestal

Quartz pedestal supporting the wafer boat at the correct height for process gas exposure.

• Height precision: ±0.5 mm
• Material: Grade 1 quartz
• Geometry: Post, saddle, or platform type per furnace OEM specification

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Customization

All baffle and insert components are manufactured to customer drawings. Common custom requests:

• Non-circular hole patterns (slots, arcs) in disc baffles
• Threaded quartz inserts (M6–M16)
• Composite assemblies (baffle welded to tube section)
• Color-coded opaque vs. transparent zones