Fused Quartz Tubes & Liners
Quartz Diffusion Tube
High-purity fused quartz diffusion and oxidation tubes for semiconductor furnaces — straight bore, flanged, and bell-end configurations for 4" to 12" wafer processes.
By Semiconductor Process
CVD / LPCVD
Quartz hardware for CVD, LPCVD, and ALD chambers, designed for gas distribution, deposition stability, and repeatable cleaning cycles.
Relevant Components
Bell jars, reactor tubes, gas injectors
12 results
Fused Quartz Boats & Carriers
Quartz Wafer Boat
Precision-machined fused quartz wafer boats for horizontal and vertical diffusion furnaces — 25-slot standard and custom slot count for 4" to 12" wafers.
Fused Quartz Rings & Flanges
Quartz Flanges & Fittings
Precision-machined fused quartz flanges, reducers, elbows, and tube fittings for semiconductor gas lines and furnace tube assemblies — compatible with standard metal flange interfaces.
Fused Quartz Rings & Flanges
Quartz Focus Ring & Etch Ring
Precision-machined fused quartz focus rings, etch rings, and edge rings for plasma etching and CVD chambers — ±0.01 mm tolerance, Ra 0.1 μm surface finish.
Fused Quartz Chambers & Bell Jars
Quartz Bell Jar & Dome
Blown and formed fused quartz bell jars and domes for CVD, epitaxy, and sputtering reactor enclosures — up to 500 mm diameter with hermetic weld flanges.
Fused Quartz Custom Parts
Quartz Gas Injector & Showerhead
Precision multi-hole quartz gas injectors and showerheads for uniform gas distribution in CVD, ALD, and diffusion furnace systems — hole arrays to ±0.02 mm positional accuracy.
Fused Quartz Tubes & Liners
Quartz Reactor Tube
High-purity fused quartz reactor tubes for epitaxy, CVD, and RTP systems — available with polished inner bore, side ports, and precision-ground flanges for process chamber integration.
Fused Quartz Plates & Windows
Quartz Viewport Window
Optically polished fused quartz and sapphire viewport windows for semiconductor process chamber monitoring — UV to mid-IR transmission, hermetic metal or CF flanges.
Fused Quartz Plates & Windows
Quartz Baffle & Insert
Custom-machined fused quartz baffles, liners, and thermal shields for semiconductor furnace tubes, diffusion systems, and CVD reactors.
Sapphire Plates & Windows
Sapphire Window & Optical Flat
Single-crystal sapphire windows and optical flats for semiconductor process chambers — UV to mid-IR transmission, Ra < 0.1 nm, extreme plasma and chemical resistance.
Alumina (Al₂O₃) Boats & Carriers
Ceramic Wafer Carrier & Boat
High-purity alumina and silicon carbide wafer carriers, boats, and cassettes for high-temperature semiconductor processes — superior wear resistance and thermal shock capability.
Fused Quartz Custom Parts
Custom Precision Parts
Drawing-based custom fabrication of fused quartz, sapphire, and technical ceramic components — from prototype to production, any geometry, any specification.