Fused Quartz Tubes & Liners
Quartz Diffusion Tube
Fused quartz diffusion and oxidation tubes for semiconductor furnaces — straight bore, flanged, and bell-end configurations reviewed against furnace and process requirements.
By Semiconductor Process
CVD / LPCVD
Quartz hardware for CVD, LPCVD, and ALD chambers, designed for gas distribution, deposition stability, and repeatable cleaning cycles.
Relevant Components
Bell jars, reactor tubes, gas injectors
12 results
Fused Quartz Boats & Carriers
Quartz Wafer Boat
Fused quartz wafer boats for horizontal and vertical diffusion furnaces, with slot count, pitch, and wafer format reviewed against drawings or samples.
Fused Quartz Rings & Flanges
Custom Quartz Flange for Fused Quartz Assemblies
Custom fused quartz flange components fabricated to drawings for quartz tube assemblies, laboratory systems, semiconductor equipment and thermal-processing applications.
Fused Quartz Rings & Flanges
Quartz Focus Ring & Etch Ring
Machined fused quartz focus rings, etch rings, and edge rings for plasma etching and CVD chambers, fabricated to drawing-based tolerance and surface requirements.
Fused Quartz Chambers & Bell Jars
Quartz Bell Jar & Dome
Blown and formed fused quartz bell jars and domes for CVD, epitaxy, and sputtering reactor enclosures, fabricated to drawing with sealing requirements reviewed by project.
Fused Quartz Custom Parts
Quartz Gas Injector & Showerhead
Custom multi-hole quartz gas injectors and showerheads for gas distribution in CVD, ALD, and diffusion furnace systems, fabricated to drawing after geometry review.
Fused Quartz Tubes & Liners
Quartz Reactor Tube
Fused quartz reactor tubes for epitaxy, CVD, and RTP systems — available with reviewed inner bore finish, side ports, and flanges for process chamber integration.
Fused Quartz Plates & Windows
Quartz Viewport Window
Fused quartz and sapphire viewport windows for semiconductor process chamber monitoring, with optical, sealing, and flange requirements reviewed case by case.
Fused Quartz Plates & Windows
Quartz Baffle & Insert
Custom-machined fused quartz baffles, liners, and thermal shields for semiconductor furnace tubes, diffusion systems, and CVD reactors.
Sapphire Plates & Windows
Sapphire Window & Optical Flat
Single-crystal sapphire windows and optical flats for semiconductor process chambers, optical monitoring, and high-temperature applications, with specifications reviewed case by case.
Alumina (Al₂O₃) Boats & Carriers
Ceramic Wafer Carrier & Boat
Alumina and silicon carbide wafer carriers, boats, and cassettes for high-temperature semiconductor processes, reviewed by material, geometry, and application requirements.
Fused Quartz Custom Parts
Custom Precision Components
Custom precision components in fused quartz, sapphire, and technical ceramics manufactured from drawings or samples for semiconductor, optics, laboratory, and industrial applications.