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Fused Quartz Vacuum Chucks & Handling Plates

Tuguan
8 月 12, 2025

Close-up of a clear Fused Quartz plate with complex internal fluidic channels and two circular ports, held by a gloved hand

Clear Fused Quartz rectangular frame or support component with a large central cutout and multiple perimeter holes.

Top-down view of a clear, square Fused Quartz plate with an intricate concentric circular and radial etched pattern, resembling a fan guard

Clear, rectangular Fused Quartz plate with a precise grid of small square openings and circular standoffs, held by a gloved hand.

Fused Quartz Vacuum Chucks & Handling Plates

Our precision custom Fused Quartz vacuum chucks, plates, and handling fixtures are engineered for demanding applications in semiconductor wafer processing, etching, and other high-tech industries. Crafted from high-purity Fused Quartz, these components ensure contamination-free, scratch-free handling, offering exceptional thermal stability and chemical inertness for reliable performance in vacuum and high-temperature environments

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Basic Dimensions

Outer Diameter (OD): 300.0 mm ±0.1
Inner Diameter (ID): 210.0 mm ±0.1
Height (H): 6.35 mm ±0.05

材料特性

基材： Al₂O₃ (氧化鋁陶瓷) / 可選：ZrO₂, Si₃N₄
密度 ≥3.90 g/cm³
彎曲強度： ≥350 MPa
熱傳導率: 24-30 W/(m·K)
介電強度: ≥15 kV/mm

公差與表面品質

同心度: ≤0.05 mm（外徑與內徑）
平行性 ≤0.03 mm (上表面/下表面)
表面粗糙度: Ra ≤0.4 μm

關鍵性能測試

尺寸檢查: 根據 ISO 286-2
洩漏率測試 ≤1×10⁻⁹ mbar·L/s (氦氣質量分析)
熱衝擊耐性: ΔT ≥300°C (5 次循環，無裂縫)

應用

半導體加工： 真空腔室，等離子蝕刻元件
高溫環境： ≤1600°C (材料依賴性)

包裝與搬運

潔淨室包裝 100級以上
防靜電 ESD安全容器

符合性聲明
符合 SEMI F47-0706（半導體設備用陶瓷元件）

免責聲明
可依需求提供客製化。以「□」標記的關鍵參數需經過明確確認。

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