Fused Quartz Nozzles & Fluid Injectors for Semiconductor

Fused Quartz Nozzles & Fluid Injectors for Semiconductor

Our precision-machined custom fused silica (quartz) nozzles and fluid injectors are engineered for demanding semiconductor, ALD/CVD, and chemical processing applications. These high-purity components offer exceptional chemical inertness, thermal stability, and precise fluid delivery, ensuring optimal performance in critical environments.

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What to Provide for a Quote

• Drawing (PDF/STEP) or key dimensions (OD / ID / Length)
• Orifice details: diameter, quantity, spacing, position; tip style; any side ports
• Operating environment: vacuum / plasma / chemicals; maximum temperature; target flow behavior
• Critical tolerances and surface finish requirements

Key Specifications

• Material: High-purity fused silica (quartz, SiO₂); material certificate available by request
• Geometry: Straight / stepped / tapered / L-shaped; fully custom per drawing
• Dimensions: Per drawing (made-to-order); uniform wall thickness per design
• Tips & Orifices: Single or multiple orifices, laser-drilled or etched; size and spacing per drawing
• Features: Side perforation arrays, lateral ports, flanges/threads/collars, end caps or hemispherical ends (optional)
• Surface Finish: Fire-polished / ground / polished (OD/ID) as required; deburred edges
• Straightness & Concentricity: Per drawing; geometry-dependent (we can advise feasible tolerances)
• Cleanliness: Ultrasonic cleaning; Class-100 compatible packaging; tip protectors
• Marking: Laser part ID or flow direction by request

Material Properties (Typical)

• High optical transmittance and very low thermal expansion
• Excellent chemical inertness to acids, alkalis, and organic solvents (except HF)
• Stable under high temperature and thermal cycling
• Electrical insulation and low outgassing for clean processes

Applications

ALD/CVD precursor delivery, plasma tools, micro-reactors, analytical instrumentation, precision chemical dosing in vacuum or high-temperature environments

Processing & Design Notes

• Orifices produced via laser drilling/etching; burr-free, chip-free edges
• Stress-relief annealing and acid cleaning available
• Fillets at sharp transitions recommended to reduce stress concentration
• Concentricity/straightness controlled per drawing; practical tolerance advice available

Inspection & Testing

• Dimensional inspection: OD/ID/length; orifice size and spacing
• Optional tests: helium leak test (for vacuum assemblies), flow-rate verification, birefringence/stress check
• 100% visual inspection for chips, cracks, and contamination

Packaging & Storage

• Anti-static, vacuum-sealed packaging with shock-absorbent foam and tip protection. Store in a dry environment (<40% RH) at 10–30 °C.

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If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

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