Fused Quartz Windows & Chamber Components

  • Close-up of a large, clear, circular 12-inch Fused Quartz plate with intricate etched radial lines and internal circles, resting on a blue surface

    • Fused Quartz Windows & Chamber Components

    Our precision custom Fused Quartz windows and chamber components are engineered for demanding applications in semiconductor manufacturing, plasma etching, and vacuum systems. Crafted from high-purity Fused Quartz, these 12-inch plates offer exceptional UV transparency, thermal stability, and chemical resistance, ensuring precise optical access and reliable performance in critical high-temperature and corrosive environments.

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    Material

    • Base Material: High-purity synthetic fused silica (SiO₂ ≥99.99%)
    • Optical Grade: UV-grade transparency with low hydroxyl (OH) content.

    Dimensions

    • Diameter :100 mm   ±0.05 mm
    • Thickness : 3 mm   ±0.05 mm
    • Edge Treatment : Fine-ground   ≤0.3 mm chamfer

     Physical Properties

    • Density: 2.2 g/cm³
    • Hardness: Mohs 5.5-6.5
    • Thermal Expansion: 0.55 × 10⁻⁶/°C (20-300°C)
    • Softening Point: 1683°C

    Optical Properties

    • Transmission Range: 190 nm (UV) to 2500 nm (IR)
    • Refractive Index: 1.458 @ 587.6 nm (nd)
    • Scratch-Dig: 60/40 (MIL-PRF-13830B)
    • Surface Flatness: λ/4 @ 632.8 nm

    Surface Specifications

    • Ra Roughness : ≤5 Å (polished surfaces)
    • Parallelism : ≤1 arcmin

    Chemical Resistance

    • Resistant to acids (except HF), water, and organic solvents.

    Applications

    • Optical windows, laser systems, UV lithography.
    • Semiconductor processing, high-temperature viewports.

    Certifications & Compliance

    • RoHS compliant.
    • Custom metrology reports available upon request.

    Packaging

    • Individually wrapped in anti-static foam.
    • Shipped in rigid, crush-proof containers.

    Notes
    Avoid mechanical shock or direct contact with sharp objects.
    Clean with IPA or acetone using lint-free wipes.
    For full technical data or custom requests, contact email

    Quick Inquiry

    If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

    Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

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