Fused Quartz Wafer Boats

  • Clear fused quartz wafer boat with multiple slots for semiconductor wafers.
  • Long, clear fused quartz rods with spiral grooves, likely components of a wafer boat.
  • Compact clear fused quartz boat or carrier design, angled view.
  • Opaque fused quartz wafer carrier frame with straight support rods.
  • Multiple individual clear fused quartz wafer support stands or components.

    • Fused Quartz Wafer Boats

    The Quartz Cleaning Boat is a high-purity, corrosion-resistant carrier designed for semiconductor, photovoltaic, and precision electronics industries. It is used to hold wafers or components during wet/dry cleaning, acid etching, or high-temperature processes.

    Get A Free Inquiry

    Product Overview

    Our high-purity, corrosion-resistant fused quartz boats and carriers are custom-designed for semiconductor, photovoltaic, and precision electronics industries. Ideal for wafer cleaning (RCA, SC1/SC2), acid etching, high-temperature annealing/diffusion, and CVD/PVD processes, these components offer ultra-clean, non-contaminating surfaces and excellent thermal stability, meeting SEMI F20/F47 standards.

    Technical Specifications

    • Parameter : Details
    • Material : Fused Quartz (SiO₂ ≥99.99%)
    • Dimensions : Customizable (Standard: Length 200–500 mm, Width 50–150 mm, Height 20–50 mm)
    • Max. Temperature : 1,200°C (Continuous Use) / 1,450°C (Short-Term)
    • Surface Finish : Acid-polished, Ra ≤0.8 μm
    • Purity : Low metallic impurities (Na, K, Fe, etc. <1 ppm)
    • Thermal Stability : Coefficient of Thermal Expansion (CTE): 0.55 ×10⁻⁶/°C (20–1,000°C)

    Key Features

    • High Chemical Resistance: Resists HF, HCl, HNO₃, and other aggressive chemicals.
    • Low Thermal Expansion: Minimizes deformation under rapid temperature changes.
    • Non-Contaminating: Ultra-clean surface prevents particle adhesion.
    • Custom Design: Slot spacing, depth, and boat geometry tailored to client needs.

    Applications

    • Wafer cleaning in wet benches (RCA, SC1/SC2).
    • Acid bath processes (e.g., BOE etching).
    • High-temperature annealing/diffusion steps.
    • CVD/PVD chamber component handling.

    Quality Assurance

    • Compliance: Meets SEMI F20/F47 standards.
    • Testing:
      ICP-MS for impurity analysis.
      Surface roughness measurement via AFM.
      Thermal shock testing (1,000°C ⇄ 25°C, 10 cycles).

    Packaging & Storage

    • Individually packed in anti-static, ESD-safe containers.
    • Store in a dry, dust-free environment (10–30°C).

    Precautions

    • Avoid mechanical impact or sudden temperature changes (>10°C/min).
    • Clean with DI water or ethanol before first use.

    Quick Inquiry

    If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

    Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

    Name (copy)
    en_USEnglish
    es_ESEspañol fr_FRFrançais de_DEDeutsch ru_RUРусский arالعربية pt_BRPortuguês do Brasil ja日本語 ko_KR한국어 zh_TW繁體中文 en_USEnglish