Fused Quartz Spray & Reaction Chambers

  • Clear Fused Quartz spray chamber with an integrated angled inlet arm and internal structure

    • Fused Quartz Spray & Reaction Chambers

    Fused quartz spray and reaction chambers designed for high-purity semiconductor, chemical, and laboratory processes. Built from ultra-high-purity fused silica and assembled by precision flame-fusion, these vessels deliver excellent chemical inertness, thermal stability, and clean, precise control of gas/liquid delivery, mixing, and residence time in critical environments.

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    What to Provide for a Quote

    • Drawing (PDF/STEP) or key dimensions: vessel diameter/height, wall thickness, dome/flat lid shape
    • Ports & connections: quantity, locations, and sizes; joint type (taper/ball-socket), hose barb, or KF/ISO/CF flange
    • Internal features: spray nozzle type, dip tube or sparger, baffles/mixers, flow distributors, drain/sump geometry
    • Process conditions: chemicals/gases, target flow rates, vacuum/allowable pressure, max temperature, cleanliness level
    • Instrumentation/windows: thermowell, sight/viewport, sampling port; o-ring groove or sealing land requirements
    • Critical tolerances: flatness/parallelism of sealing faces, concentricity/runout of necks/ports
    • Quantity (prototype or batch), inspection reports needed, and packaging level

    Key Specifications

    • Material: High-purity fused quartz (SiO₂); material certificate available by request
    • Configurations: Cylindrical or spherical-dome chambers; single or multi-port lids; integrated manifolds or risers; drain/sump options
    • Connections: Ground glass joints, ball/socket, hose barbs, KF/ISO/CF flanges, or custom adapters
    • Internal Hardware: Spray nozzles/injectors, dip tubes, diffusers/spargers, baffles, flow straighteners—per drawing
    • Construction: Precision machining with flame-fused transitions; stress-relief annealing available
    • Surfaces & Cleanliness: Smooth, chip-free wetted surfaces; ultrasonic/DI cleaning; Class-100 compatible packaging
    • Service Note: Intended for vacuum or low-pressure service; any pressure rating is design- and test-dependent

    Material Properties (Typical)

    • Exceptional chemical resistance and low extractables (note: HF attacks quartz)
    • Very low thermal expansion with good thermal-shock tolerance
    • Electrically insulating, optically clear, and low outgassing—ideal for high-purity service

    Processing & Design Notes

    • Use generous radii at junctions to reduce stress and particle traps; polish wetted surfaces to minimize shedding
    • Define spray pattern/angle, target droplet size, and residence-time goals when specifying nozzles and baffles
    • Add venting on blind cavities and threaded features to prevent virtual leaks in vacuum duty
    • Provide drain slope/sump geometry to avoid liquid hold-up; consider anti-reflux features where needed
    • Choose connection standards to match your downstream plumbing and maintenance practice
    • We can advise practical tolerances for sealing-face flatness, port concentricity, and alignment based on size/geometry

    Inspection & Testing

    • Dimensional verification: vessel size, port positions, neck concentricity, sealing-face geometry
    • Optional tests: helium leak test (vacuum assemblies), flow/hold or pressure-decay test per design
    • Visual inspection: 100% check for chips, micro-cracks, inclusions, and contamination
    • Optional birefringence/stress evaluation and cleanliness certification

    Applications

    Precursor spraying and mixing for ALD/CVD, wet-chem spray/etch/rinse, vapor/liquid contacting, micro-reactors, gas scrubbing, and analytical/lab systems requiring high purity and visual access

    Packaging & Storage

    Protective caps on ports; anti-static, vacuum-sealed packaging with shock-absorbent foam and rigid outer protection. Store dry (<40% RH) at 10–30 °C and away from HF-containing chemicals.

    Notes
    Custom configurations (hole patterns, coatings, or additional markings) available upon request.
    Compliance certificates (RoHS, ISO 9001) provided with bulk orders.

    Quick Inquiry

    If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

    Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

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