Fused Quartz Reactors, Heat Exchangers & Bubblers

  • Clear Fused Quartz multi-tube reactor with top inlets/outlets and a side arm.
  • Stacked, frosted Fused Quartz plates with supporting posts, possibly for gas distribution.
  • Frosted Fused Quartz process vessel with internal vertical rods and a tiered base.
  • Clear Fused Quartz inline reactor or heat exchanger with multiple internal tubes and end connectors.

    • Fused Quartz Reactors, Heat Exchangers & Bubblers

    Custom fused quartz reactors, heat exchangers, and bubblers engineered for semiconductor tools, chemical processing, and laboratory use. Built from ultra-high-purity fused silica and assembled by precision flame-fusion, these complex components provide outstanding chemical resistance, thermal stability, and clean, precise fluid/vapor handling in vacuum and high-temperature environments.

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    What to Provide for a Quote

    • Drawing (PDF/STEP) or key dimensions and layout (tube OD/ID/lengths, coil or bundle geometry, vessel size)
    • Process conditions: gases/chemicals, max temperature, vacuum level/allowable pressure, target flow rates and heat load
    • Connection types: ground glass joints, ball/socket, KF/ISO/CF flanges, or custom adapters
    • Internal features: dip tube length, sparger/multi-hole diffuser, baffles, coils/jacket, thermowell/sight ports
    • Critical tolerances: concentricity, straightness, parallelism, leak rate specification
    • Quantity (prototype or batch), inspection reports needed, packaging/cleanliness level

    Key Specifications

    • Material: High-purity fused quartz (SiO₂); material certificate available by request
    • Configurations:
      Reactors: straight or jacketed vessels, multi-port manifolds, integrated coils or baffles
      Heat exchangers: coil, serpentine, or tube-in-tube styles; multi-tube bundles; inlet/outlet manifolds
      Bubblers: single or dual-port designs with internal dip tube/sparger; vapor outlet above liquid level
    • Connections: Standard taper joints, ball/socket, KF/ISO/CF flanges, hose barbs, or custom terminations
    • Assembly: Precision flame-fused joints and transitions; stress-relief annealing available
    • Surface & Cleanliness: Smooth, chip-free edges; ultrasonic/DI cleaning; Class-100 compatible packaging
    • Design Limits: Per drawing; intended for vacuum or low-pressure service—pressure ratings defined by design and test plan

    Material Properties (Typical)

    • Exceptional chemical inertness (note: HF attacks quartz)
    • High thermal stability with very low thermal expansion
    • Electrically insulating, low outgassing; optically clean surfaces suitable for high-purity service

    Processing & Design Notes

    • Use generous radii at junctions to reduce stress and particle traps
    • Add vents to avoid virtual leaks in vacuum paths; specify desired leak-rate target
    • Coil pitch, tube spacing, and wall thickness should reflect required heat transfer and pressure drop
    • For bubblers, define liquid level, dip-tube immersion depth, and desired bubble size (sparger type)
    • Choose joint/flange standards to match downstream equipment and maintenance practice

    Inspection & Testing

    • Dimensional verification (tube OD/ID/lengths, coil geometry, port positions)
    • Helium leak test by request (vacuum service); optional flow/pressure hold test per design
    • Birefringence/stress check, visual inspection for chips, cracks, inclusions, and contamination
    • Cleanliness verification and packaging certificates available

    Applications

    ALD/CVD precursor delivery (bubblers), vapor generation and scrubbing, heat exchange in corrosive or high-purity lines, micro-reactors, laboratory and pilot-scale processing

    Packaging & Storage

    Anti-static, vacuum-sealed packaging with shock-absorbent foam and rigid protection for fragile appendages. Store dry (<40% RH) at 10–30 °C. Keep away from HF-containing chemicals.

    Notes
    Custom configurations (hole patterns, coatings, or additional markings) available upon request.
    Compliance certificates (RoHS, ISO 9001) provided with bulk orders.

    Quick Inquiry

    If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

    Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

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