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Fused Quartz Nozzles & Fluidic Components
Fused quartz nozzles, spray heads, injectors, diffusers, and fluidic manifolds engineered for semiconductor tools, ALD/CVD, wet benches, and chemical/lab systems. Built from high-purity fused silica and precision-machined to your drawing, these parts provide excellent chemical inertness, thermal stability, and precise, clean delivery of gases and liquids in vacuum and high-temperature environments.
What to Provide for a Quote
- Drawing (PDF/STEP) or key dimensions: body size, wall thickness, port locations
- Medium and targets: gas/liquid, flow rate range, pressure/vacuum, spray cone or jet style
- Orifice details: diameter, quantity, spacing, position; single vs. multi-orifice; internal diffuser/sparger if needed
- Manifold/channel details (if applicable): layout, cross-section shape, mixing zones, dead-volume limits
- Connection types: threaded ends, hose barbs, compression fittings, KF/ISO flanges, or custom adapters
- Critical tolerances and surface finish of wetted areas; cleanliness level
- Quantity (prototype or batch), inspection reports, packaging level
Key Specifications
- Material: High-purity fused quartz (SiO₂); material certificate available by request
- Types: Nozzles/injectors, spray heads, diffusers/spargers, distribution manifolds, micro-reactor or mixing blocks
- Dimensions: Per drawing (made-to-order) with uniform wall thickness for thermal stability
- Orifices & Passages: Laser-drilled or etched; single or multi-orifice arrays; channel geometry per design
- Connections: Threads, barbs, compression or flange interfaces; alignment features and laser part ID by request
- Surface Finish: Fire-polished rims; ground or polished wetted surfaces to minimize particle generation
- Construction: Precision machining with flame-fused joints; optional bonded cover plates for manifold designs
- Cleanliness: Ultrasonic/DI cleaning; Class-100 compatible packaging
- Service Note: Intended for vacuum or low-pressure service; any pressure rating is design- and test-dependent
Material Properties (Typical)
- Excellent chemical resistance to most acids/alkalis and organic solvents (note: HF attacks quartz)
- Very low thermal expansion with high thermal-shock tolerance
- Electrically insulating, low outgassing; optically clean surfaces
Processing & Design Notes
- Use generous radii at internal transitions to reduce stress and particle traps
- Keep passage lengths and cross-sections consistent to achieve uniform flow distribution
- Vent through-holes exposed to vacuum to avoid virtual leaks; specify acceptable leak rate
- Select connection standards to match downstream plumbing; avoid sharp threads at thin sections
- We can advise practical tolerances for orifice size/spacing, concentricity, straightness, and surface finish based on geometry
Inspection & Testing
- Dimensional verification: body size, port positions, orifice size and spacing; channel geometry (for manifolds)
- Optional: helium leak test (vacuum assemblies), pressure/hold test per design, and flow-rate characterization
- 100% visual inspection for chips, micro-cracks, inclusions, and contamination
- Cleanliness certificates and material traceability available
Applications
Process gas injection and distribution, ALD/CVD precursor delivery, spray etch/rinse, microfluidic mixing and metering, vapor/liquid manifolds for analytical instruments and high-purity chemical lines
Packaging & Storage
Anti-static, vacuum-sealed packaging with shock-absorbent foam and protective caps on ports/orifices. Store dry (<40% RH) at 10–30 °C; keep away from HF-containing chemicals.
Notes
Custom configurations (hole patterns, coatings, or additional markings) available upon request.
Compliance certificates (RoHS, ISO 9001) provided with bulk orders.
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