Fused Quartz Curved Plates & Furnace Tube Liners

Fused Quartz Curved Plates & Furnace Tube Liners

Fused quartz curved plates and half-tube liners engineered for high-temperature, high-purity environments in semiconductor tools, chemical processing, and industrial furnaces. Manufactured from high-purity fused silica with smooth, chip-free edges, these parts provide excellent thermal stability, chemical inertness, and precise fit—offering reliable protection, clean flow, and long service life.

Get A Free Inquiry

What to Provide for a Quote

• Drawing (PDF/STEP) or key dimensions: inner/outer radius (or tube ID/OD), arc angle (e.g., 90°/120°/180°), length, thickness
• Geometry: single curved plate, half-tube, quarter cylinder, or segmented liner; overlap or butt joint style
• End & edge details: square/rounded ends, lips/flanges, tabs, chamfer/bevel; any slots, holes, or windows
• Interface & fit: mating tube or frame size, target liner-to-wall gap, contact/landing areas, mounting or clamp method
• Operating conditions: chemistry, maximum temperature and thermal cycling, vacuum/pressure (if any), cleanliness level
• Critical tolerances: profile/radius accuracy, straightness, parallelism, roundness/runout along the arc
• Quantity (prototype or batch); requested inspection reports and packaging level

Key Specifications

• Material: High-purity fused quartz (SiO₂); material certificate available by request
• Geometry: Curved plates, half-tube liners, quarter-sections, split sleeves, and custom arc segments—monolithic or flame-fused assemblies
• Dimensions: Per drawing (made-to-order) with uniform wall thickness for thermal stability
• Edges & Surfaces: Fire-polished rims; ground or polished functional faces; smooth radii to minimize particle generation
• Optional Features: Relief/vent holes, alignment notches/keys, o-ring grooves or sealing lands, locator tabs
• Variants: Opaque (OP) quartz available for added thermal shielding; clear fused quartz for visual inspection
• Cleanliness: Ultrasonic/DI cleaning; Class-100 compatible packaging

Material Properties (Typical)

• Very low thermal expansion with good thermal-shock tolerance
• Excellent chemical resistance to most process media (note: HF attacks quartz)
• Electrically insulating, low outgassing; optically clean where transparency is required

Processing & Design Notes

• Define whether radius is referenced to the inner or outer surface; keep wall thickness uniform to reduce stress
• Allow expansion gaps and compliant clamping to avoid stress during thermal cycling
• Add generous fillets at transitions and deburr all edges to prevent chipping and particle traps
• For segmented liners, specify joint overlap/spacing and any anti-rotation features
• We can advise feasible tolerances for radius/profile, flatness/straightness, and runout based on size and geometry

Inspection & Testing

• Dimensional verification: radius/arc angle/length/thickness; profile tolerance along the arc; hole/slot positions
• Flatness/straightness checks on reference lands; roundness/runout relative to datum
• 100% visual inspection for chips, micro-cracks, inclusions, and contamination
• Optional: birefringence/stress evaluation and cleanliness report

Applications

Furnace tube liners and split sleeves, thermal shields and splash guards, protective baffles, curved windows or guides for high-purity, high-temperature processes (diffusion/oxidation/CVD, wet benches, and lab furnaces)

Packaging & Storage

Edge guards and curved separators; anti-static, vacuum-sealed packaging with rigid outer protection. Store dry (<40% RH) at 10–30 °C; keep away from HF-containing chemicals.

Quick Inquiry

If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

请在浏览器中启用JavaScript来完成此表单。

Name (copy) *

前一页

后一页

Email *

Single Line Text

Comment or Message *

Send Message