Sapphire Components for Extreme Industrial Demands

  • Three translucent sapphire glass steps or support rings with central holes and flared bases.
  • Assortment of clear sapphire components, including circular base parts with central posts and smaller conical pieces.
  • Three clear, rectangular sapphire glass components with raised, open box-like structures.

    • Sapphire Components for Extreme Industrial Demands

    Precision ceramic cover plates, crafted from high-purity Alumina (Al2O3), Zirconia (ZrO2), or Silicon Nitride (Si3N4), are engineered for critical semiconductor processing, vacuum, and plasma etching. These custom plates offer superior thermal, electrical, and mechanical properties, meeting strict industry standards for demanding high-temperature applications.

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    Basic Dimensions

    • Outer Diameter (OD): 300.0 mm ±0.1
    • Inner Diameter (ID): 210.0 mm ±0.1
    • Height (H): 6.35 mm ±0.05

    Material Properties

    • Base Material: Al₂O₃ (Alumina Ceramic) / Optional: ZrO₂, Si₃N₄
    • Density: ≥3.90 g/cm³
    • Flexural Strength: ≥350 MPa
    • Thermal Conductivity: 24-30 W/(m·K)
    • Dielectric Strength: ≥15 kV/mm

    Tolerance & Surface Quality

    • Concentricity: ≤0.05 mm (OD vs. ID)
    • Parallelism: ≤0.03 mm (Top/Bottom Surfaces)
    • Surface Roughness: Ra ≤0.4 μm

    Key Performance Tests

    • Dimensional Inspection: Per ISO 286-2
    • Leakage Rate Test: ≤1×10⁻⁹ mbar·L/s (Helium Mass Spectrometry)
    • Thermal Shock Resistance: ΔT ≥300°C (5 cycles, no cracks)

    Applications

    • Semiconductor Processing: Vacuum chambers, Plasma etching components
    • High-Temperature Environments: ≤1600°C (Material-Dependent)

    Packaging & Handling

    • Cleanroom Packaging: Class 100 or better
    • Anti-Static: ESD-safe containers

    Compliance Statement
    Meets SEMI F47-0706 (Ceramic Components for Semiconductor Equipment)

    Disclaimer
    Customization available upon request. Critical parameters marked with “□” require explicit confirmation.

    Quick Inquiry

    If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

    Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

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