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Fused Quartz Gas Diffuser Rods & Vent Rods
Our precision custom Fused Quartz gas diffuser rods and vent rods are engineered for demanding high-purity applications in semiconductor manufacturing, plasma etching, and chemical processing. Crafted from ultra-high purity Fused Quartz, these components offer superior chemical inertness, exceptional thermal stability, and precise feature geometry for accurate gas/liquid distribution and flow control in critical environments.
Material
- Base Material: High-purity synthetic fused silica (SiO₂ ≥99.99%)
- Optical Grade: UV-grade transparency with low hydroxyl (OH) content.
Dimensions
- Diameter :100 mm ±0.05 mm
- Thickness : 3 mm ±0.05 mm
- Edge Treatment : Fine-ground ≤0.3 mm chamfer
Physical Properties
- Density: 2.2 g/cm³
- Hardness: Mohs 5.5-6.5
- Thermal Expansion: 0.55 × 10⁻⁶/°C (20-300°C)
- Softening Point: 1683°C
Optical Properties
- Transmission Range: 190 nm (UV) to 2500 nm (IR)
- Refractive Index: 1.458 @ 587.6 nm (nd)
- Scratch-Dig: 60/40 (MIL-PRF-13830B)
- Surface Flatness: λ/4 @ 632.8 nm
Surface Specifications
- Ra Roughness : ≤5 Å (polished surfaces)
- Parallelism : ≤1 arcmin
Chemical Resistance
- Resistant to acids (except HF), water, and organic solvents.
Applications
- Optical windows, laser systems, UV lithography.
- Semiconductor processing, high-temperature viewports.
Certifications & Compliance
- RoHS compliant.
- Custom metrology reports available upon request.
Packaging
- Individually wrapped in anti-static foam.
- Shipped in rigid, crush-proof containers.
Notes
Avoid mechanical shock or direct contact with sharp objects.
Clean with IPA or acetone using lint-free wipes.
For full technical data or custom requests, contact email
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