Call us: +86 0518-87284110
Fused Quartz Dome Covers & Process Lids
Fused quartz dome covers and process lids for high-purity semiconductor tools, optical assemblies, and high-temperature chambers. Made from high-purity fused silica with smooth, chip-free edges, these domes deliver outstanding thermal stability, chemical inertness, and precise fit—providing clear viewing, reliable sealing, and protection in sensitive environments.
What to Provide for a Quote
- Drawing (PDF/STEP) or key dimensions: outer diameter, flange diameter/width, sag height (radius of curvature), wall thickness
- Dome style: hemispherical, shallow/broad, or meniscus; with/without flange or ring; clear vs. frosted viewing zone
- Sealing interface: o-ring groove size/position, sealing land width/finish, mating surface and bolt pattern if any
- Optical needs (if applicable): polish level on viewing area, scratch-dig target, surface flatness/power/irregularity
- Operating conditions: vacuum/allowable pressure, process gases/chemistry, max temperature and thermal cycling, cleanliness level
- Critical tolerances: runout/concentricity, flange parallelism/flatness, thickness uniformity, dome profile tolerance
- Quantity (prototype or batch), required inspection reports, and packaging level
Key Specifications
- Material: High-purity fused quartz (SiO₂); material certificate available by request. UV-grade fused silica optional for deep-UV transmission.
- Geometry: Hemispherical or shallow domes; domes with integral flanges/rings; circular or custom aperture lids; monolithic or flame-fused assemblies.
- Surfaces: Optical-polished viewing zones; ground/polished sealing lands; optional frosted/etched areas to diffuse light.
- Edges: Fire-polished rims and generous radii to minimize particle generation and chipping.
- Cleanliness: Ultrasonic/DI cleaning; Class-100 compatible packaging.
- Service Note: Typically for vacuum or low positive pressure; any pressure rating is design- and test-dependent.
Material Properties (Typical)
- Very low thermal expansion and good thermal-shock tolerance
- Excellent chemical resistance to most process media (note: HF attacks quartz)
- Electrically insulating, low outgassing; high optical clarity from UV to IR (grade-dependent)
Processing & Design Notes
- Define whether dome radius is referenced to the inner or outer surface; keep wall thickness uniform to reduce stress.
- Specify viewing-area polish and any optical specs (e.g., scratch-dig 60-40 or better) only where needed to control cost.
- Add venting to blind features (bolt holes/counterbores) that see vacuum to prevent virtual leaks.
- Use compliant seals/clamps and allow thermal expansion to avoid stress during thermal cycling.
- We can advise feasible tolerances for profile/sag height, flange flatness/parallelism, concentricity, and runout based on size.
Inspection & Testing
- Dimensional verification: OD, flange geometry, sag height/radius, thickness, groove size/position, bolt-circle locations
- Flatness/parallelism checks on sealing lands; dome profile and runout vs. datum
- Optical inspection of viewing area (polish quality, defects) as specified
- 100% visual inspection for chips, micro-cracks, inclusions, and contamination; optional cleanliness and birefringence/stress reports
Applications
View and process lids for etch/CVD/RTP and vacuum chambers, optical windows and lamp housings, splash/particle protection, high-temperature reactor covers
Packaging & Storage
Edge guards and protective films over viewing/sealing areas; anti-static, vacuum-sealed packaging with rigid outer protection. Store dry (<40% RH) at 10–30 °C and away from HF-containing chemicals.
Notes
Custom configurations (hole patterns, coatings, or additional markings) available upon request.
Compliance certificates (RoHS, ISO 9001) provided with bulk orders.
English 
Español 
Français 
Deutsch 
Русский 
العربية 
Português do Brasil 
日本語 
한국어 
繁體中文