Call us: +86 0518-87284110
Fused Quartz Bubbler Tubes & Gas Spargers
Fused quartz bubbler tubes and gas spargers designed for high-purity semiconductor, chemical, and laboratory processes. Made from ultra-high-purity fused silica and assembled by precision flame-fusion, these components deliver excellent chemical inertness, thermal stability, and clean, precise dispersion of gases into liquids or slurries in critical environments.
What to Provide for a Quote
- Drawing (PDF/STEP) or key dimensions: tube OD/ID/length; immersion depth; bend/arm geometry
- Sparger head style: multi-orifice tip, perforated bulb, slotted tip, or porous head (by request)
- Target bubble size / distribution, gas type & flow-rate range; liquid/chemistry and operating temperature
- Connection type: straight tube, ground joint, ball/socket, hose barb, or KF/ISO/CF adapter
- Cleanliness level and surface finish of wetted areas; backflow/anti-siphon requirements
- Any test requirements (helium leak, flow characterization, hold/pressure test) and packaging level
Key Specifications
- Material: High-purity fused quartz (SiO₂); material certificate available on request
- Configurations: Straight or L-shaped dip tubes; single or multiple bulbs; side ports; integral hangers/positioning collars
- Dispersion Options: Laser-drilled or etched orifices; slotted tips; optional porous diffuser heads
- Construction: Smooth flame-fused transitions and stress-relief annealing; chip-free, polished ends
- Connections: Ground taper joints, ball/socket joints, hose barbs, or vacuum flanges as specified
- Cleanliness: Ultrasonic/DI cleaning; Class-100 compatible packaging
- Service Note: Intended for vacuum or low positive pressure; any pressure rating is design- and test-dependent
Material Properties (Typical)
- Excellent chemical resistance and low extractables (note: HF attacks quartz)
- Very low thermal expansion and good thermal-shock tolerance
- Electrically insulating, low outgassing; optically clean wetted surfaces
Processing & Design Notes
- Match orifice count/size to the target bubble size and gas flow; distribute ports to avoid coalescence
- Provide vent paths for blind cavities to prevent virtual leaks in vacuum systems
- Use generous fillets at junctions to minimize stress and particle traps; polish wetted surfaces where needed
- Define immersion depth and anti-siphon features for safe shutdown; add drain/flush provisions if required
- We can advise practical tolerances for straightness, concentricity, and orifice placement based on geometry
Inspection & Testing
- Dimensional verification: OD/ID/length, bend geometry, orifice size/count/placement
- Optional: helium leak test (vacuum duty), flow-rate and pressure-drop characterization, cleanliness report
- 100% visual inspection for chips, micro-cracks, inclusions, and contamination
Applications
Gas dispersion in wet benches and chemical baths, precursor/vapor bubbling, mixing and aeration in high-purity systems, scrubbing and analytical/lab processes
Packaging & Storage
Protective caps on orifices and ends; anti-static, vacuum-sealed packaging with shock-absorbent foam and rigid outer protection. Store dry (<40% RH) at 10–30 °C, away from HF-containing chemicals.
Notes
Custom configurations (hole patterns, coatings, or additional markings) available upon request.
Compliance certificates (RoHS, ISO 9001) provided with bulk orders.