Fused Quartz Bubbler Tubes & Gas Spargers

Fused Quartz Bubbler Tubes & Gas Spargers

Fused quartz bubbler tubes and gas spargers designed for high-purity semiconductor, chemical, and laboratory processes. Made from ultra-high-purity fused silica and assembled by precision flame-fusion, these components deliver excellent chemical inertness, thermal stability, and clean, precise dispersion of gases into liquids or slurries in critical environments.


What to Provide for a Quote

  • Drawing (PDF/STEP) or key dimensions: tube OD/ID/length; immersion depth; bend/arm geometry
  • Sparger head style: multi-orifice tip, perforated bulb, slotted tip, or porous head (by request)
  • Target bubble size / distribution, gas type & flow-rate range; liquid/chemistry and operating temperature
  • Connection type: straight tube, ground joint, ball/socket, hose barb, or KF/ISO/CF adapter
  • Cleanliness level and surface finish of wetted areas; backflow/anti-siphon requirements
  • Any test requirements (helium leak, flow characterization, hold/pressure test) and packaging level

Key Specifications

  • Material: High-purity fused quartz (SiO₂); material certificate available on request
  • Configurations: Straight or L-shaped dip tubes; single or multiple bulbs; side ports; integral hangers/positioning collars
  • Dispersion Options: Laser-drilled or etched orifices; slotted tips; optional porous diffuser heads
  • Construction: Smooth flame-fused transitions and stress-relief annealing; chip-free, polished ends
  • Connections: Ground taper joints, ball/socket joints, hose barbs, or vacuum flanges as specified
  • Cleanliness: Ultrasonic/DI cleaning; Class-100 compatible packaging
  • Service Note: Intended for vacuum or low positive pressure; any pressure rating is design- and test-dependent

Material Properties (Typical)

  • Excellent chemical resistance and low extractables (note: HF attacks quartz)
  • Very low thermal expansion and good thermal-shock tolerance
  • Electrically insulating, low outgassing; optically clean wetted surfaces

Processing & Design Notes

  • Match orifice count/size to the target bubble size and gas flow; distribute ports to avoid coalescence
  • Provide vent paths for blind cavities to prevent virtual leaks in vacuum systems
  • Use generous fillets at junctions to minimize stress and particle traps; polish wetted surfaces where needed
  • Define immersion depth and anti-siphon features for safe shutdown; add drain/flush provisions if required
  • We can advise practical tolerances for straightness, concentricity, and orifice placement based on geometry

Inspection & Testing

  • Dimensional verification: OD/ID/length, bend geometry, orifice size/count/placement
  • Optional: helium leak test (vacuum duty), flow-rate and pressure-drop characterization, cleanliness report
  • 100% visual inspection for chips, micro-cracks, inclusions, and contamination

Applications

Gas dispersion in wet benches and chemical baths, precursor/vapor bubbling, mixing and aeration in high-purity systems, scrubbing and analytical/lab processes

Packaging & Storage

Protective caps on orifices and ends; anti-static, vacuum-sealed packaging with shock-absorbent foam and rigid outer protection. Store dry (<40% RH) at 10–30 °C, away from HF-containing chemicals.

Notes
Custom configurations (hole patterns, coatings, or additional markings) available upon request.
Compliance certificates (RoHS, ISO 9001) provided with bulk orders.

Quick Inquiry

If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

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