Fused Quartz Vacuum Chucks & Handling Plates

  • Close-up of a clear Fused Quartz plate with complex internal fluidic channels and two circular ports, held by a gloved hand
  • Clear Fused Quartz rectangular frame or support component with a large central cutout and multiple perimeter holes.
  • Top-down view of a clear, square Fused Quartz plate with an intricate concentric circular and radial etched pattern, resembling a fan guard
  • Clear, rectangular Fused Quartz plate with a precise grid of small square openings and circular standoffs, held by a gloved hand.

    • Fused Quartz Vacuum Chucks & Handling Plates

    Our precision custom Fused Quartz vacuum chucks, plates, and handling fixtures are engineered for demanding applications in semiconductor wafer processing, etching, and other high-tech industries. Crafted from high-purity Fused Quartz, these components ensure contamination-free, scratch-free handling, offering exceptional thermal stability and chemical inertness for reliable performance in vacuum and high-temperature environments

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    Basic Dimensions

    • Outer Diameter (OD): 300.0 mm ±0.1
    • Inner Diameter (ID): 210.0 mm ±0.1
    • Height (H): 6.35 mm ±0.05

    Material Properties

    • Base Material: Al₂O₃ (Alumina Ceramic) / Optional: ZrO₂, Si₃N₄
    • Density: ≥3.90 g/cm³
    • Flexural Strength: ≥350 MPa
    • Thermal Conductivity: 24-30 W/(m·K)
    • Dielectric Strength: ≥15 kV/mm

    Tolerance & Surface Quality

    • Concentricity: ≤0.05 mm (OD vs. ID)
    • Parallelism: ≤0.03 mm (Top/Bottom Surfaces)
    • Surface Roughness: Ra ≤0.4 μm

    Key Performance Tests

    • Dimensional Inspection: Per ISO 286-2
    • Leakage Rate Test: ≤1×10⁻⁹ mbar·L/s (Helium Mass Spectrometry)
    • Thermal Shock Resistance: ΔT ≥300°C (5 cycles, no cracks)

    Applications

    • Semiconductor Processing: Vacuum chambers, Plasma etching components
    • High-Temperature Environments: ≤1600°C (Material-Dependent)

    Packaging & Handling

    • Cleanroom Packaging: Class 100 or better
    • Anti-Static: ESD-safe containers

    Compliance Statement
    Meets SEMI F47-0706 (Ceramic Components for Semiconductor Equipment)

    Disclaimer
    Customization available upon request. Critical parameters marked with “□” require explicit confirmation.

    Quick Inquiry

    If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

    Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.

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