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Fused Quartz Ring Covers & Protective Plates

Tuguan
August 9, 2025

Clear Fused Quartz ring cover with concentric circles, an oval central opening, and perimeter holes

Fused Quartz Ring Covers & Protective Plates

Fused quartz ring covers and protective plates for semiconductor equipment, vacuum systems, and optical assemblies. Manufactured from high-purity fused silica and machined to your drawing, these clear components deliver excellent optical clarity, thermal stability, chemical inertness, and precise fit—providing reliable sealing, splash protection, and visual access in sensitive environments.

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What to Provide for a Quote

Drawing (PDF/STEP) or key dimensions: outer Ø, inner Ø/opening, thickness
Bolt pattern: bolt-circle Ø (BCD), hole Ø/quantity, slot or clearance style, countersink/counterbore details
Sealing features: o-ring groove size/position, sealing land width/finish, gasket interface
Functional options: sight window zone, raised/stepped rims, alignment notches/keys, vent holes to avoid virtual leaks
Operating conditions: vacuum level/pressure, chemicals, temperature, cleanliness target
Critical tolerances: flatness, parallelism, concentricity/runout; surface quality on sealing and optical areas
Quantity (prototype or batch), inspection reports required, packaging level

Key Specifications

Material: High-purity fused quartz (SiO₂); material certificate available on request
Geometry: Round or polygonal ring covers, donuts, full plates with central aperture; single-piece or multi-piece assemblies per drawing
Dimensions: Per drawing (made-to-order); uniform section thickness for thermal stability
Edges & Surfaces: Fire-polished rims; ground/polished sealing lands and viewing surfaces to minimize particles and improve seal integrity
Mounting & Alignment: Precise bolt patterns, countersinks/counterbores, dowel/locator features; optional laser part ID/orientation mark
Cleanliness: Ultrasonic/DI cleaning and Class-100 compatible packaging

Material Properties (Typical)

Excellent chemical resistance to most process media (note: HF attacks quartz)
Very low thermal expansion and good thermal-shock tolerance
Electrically insulating, low outgassing; high optical clarity for viewing/alignment

Processing & Design Notes

Define sealing land width/finish and o-ring groove geometry to meet target leak rate
Add venting on blind features that see vacuum to prevent virtual leaks
Use generous internal radii and deburred edges to reduce stress and particle generation
We can advise feasible tolerances for flatness, parallelism, concentricity, and runout based on size/geometry

Inspection & Testing

Dimensional verification: OD/ID/thickness, bolt-circle, hole Ø/position, groove size/position
Flatness and parallelism checks of sealing and optical surfaces
100% visual inspection for chips, micro-cracks, inclusions, and contamination
Optional: helium leak test (assembly), surface finish verification, cleanliness report

Applications

Chamber covers and viewports, ring-shaped protective plates, splash shields for wet benches, vacuum door interfaces, optical and alignment plates in metrology or lithography subsystems

Packaging & Storage

Edge guards and protective films on optical/sealing areas; anti-static, vacuum-sealed packaging with rigid outer protection. Store dry (<40% RH) at 10–30 °C; keep away from HF-containing chemicals.

Notes
Custom configurations (hole patterns, coatings, or additional markings) available upon request.
Compliance certificates (RoHS, ISO 9001) provided with bulk orders.

Quick Inquiry

If you want to know more about quartz glass or seek quartz glass solutions, contact us for professional services!

Available 24/7 via email or phone to help you with purchasing our quartz glass products, solutions, usage issues, or providing technical support.